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I think, at her true power, Illyria would be the more powerful. I don't think any mortal, no matter how powerful, could stand toe-to-toe with an Old One. We have no idea what the limits of Illyria's power were.
After "Time Bomb" Willow would definately be the more powerful. She held her own against faux-Cordy (even though Cordy's possessor wasn't at full strength, she was a PTB-like being and therefore an equal to an Old One), had the power and intelligence to end the world (remember, Willow was never beaten - she chose to stop) and change a 3,000 yr old spell controlling the Slayer-line.
Of course, Illyria has millions of years of knowledge at her disposal and there is no reason she can't direct the power she has left into magic, but I'd still give Willow the edge - if she was prepared and in the proper mind-set.
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